气体放电阴极鞘层氩离子的自洽蒙特卡罗模拟
A SELF-CONSISTENT MONTE CARLO SIMULATION OF IONS IN CATHODE SHEATH OF ARGON GAS DISCHARGES
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摘要: 建立了气体放电阴极鞘层离子的自洽蒙特卡罗模拟模型,考虑了离子与中性原子的电荷交换碰撞和弹性散射,用到了精确依赖于离子能量的电荷交换和动量输运截面。模拟了氩离子在阴极鞘层中的运动,得到了不同气压下自治电场分布,离子的能量分布和角分布,发现:离子由鞘层边界向阴极运动过程中,离子能量分布的高能部分逐渐增大,角分布向小角度部分压缩,鞘层中的强电场加速和聚焦了离子;在鞘层边界附近的电场呈非线性。Abstract: A self-consistent Monte Carlo simulation method that includes charge exchange and elastic scattering is developed to calculate the energy and angle distributions of ions in cathode sheath of a DC argon gas discharge for the different pressures. Cross sections of the charge exchange and the momentum transfer that depend on the ion energy are taken into account precisely. It is found that, as the ions move towards the cathode, the high energy portions of ion energy distributions are enhanced gradually and the small-angle portions of the angle distributions increase. A strong field accelerates the ions to higher speed and ensures that more ions move along the lines of force. The self-consistent electric field spatial variation in the sheath is nonlinear.