低能电子束曝光中的Monte-Carlo方法及沉积能分布

MONTE CARLO METHOD AND ENERGY DISSIPATION DISTRIBUTION IN LOW-ENERGY ELECTRON BEAM LITHOGRAPHY

  • 摘要: 建立一个低能电子在多元多层介质中散射Monte-Carlo模拟计算方法。低能电子在多元介质中弹性散射用Mot截面描述并应用作者提出的平均散射截面方法进行模拟计算;给出多元介质中修正的Bethe方程计算低能电子非弹性散射能量损失。计算了低能电子在电子束曝光胶中能量沉积分布。

     

    Abstract: A Monte-Carlo method on low-energy electron (LEE) scatttering in multilyer and polybasic medium is proposed. The Mott cross-section applies for discribing the elastic scattering of LEE, and the idea of mean cross section is suggested to simulate LEE elastic scattering in polybasic medium; the modified Bethe formula in polybasic medium is used for calculating energy loss of LEE inelastic scattering. The energy dissipation distributions of LEE in PMMA have been obtained.

     

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