磁六极球差校正系统的计算与分析
COMPUTATION AND ANALYSIS OF A MAGNETIC SEXTUPOLE SYSTEM FOR CORRECTION OF SPHERICAL ABERRATION
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摘要: 限制电子显微镜分辨本领的主要因素是电子透镜的球差,对一种实际的校正磁透镜的磁六极球差校正系统进行了计算和分析。计算结果表明利用该系统可以消除三级球差。Abstract: The spherical aberration of electron lens is always the principal factor which limits the resolution of electron microscope.An analysis and computation of magretic sextupole corrector to correct spherical aberration in a round lens is presented.The numerical results show that resolution of electron microscope can be improved by using the present system.
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