Abstract: The application of iterative regularization deconvolution to solve an ill-posed problem is discussed. Firstly, the theoretical foundation of iterative regularization is introduced, and a new Fredholm integral equation of the first kind including space charge distribution is derived .The effect of additive Gaussian white noise for iterative deconvolution algorithm, and the effect of iterative convergence criterion for the numerical solution are studied, respectively. It is shown that the solution of ill-posed problems could be obtained with iterative deconvolution algorithm under lower level noise circumstance. It also indicates that the precision of numerical solution is influenced by the iterative convergence criterion. Finally,the original experimental data are dealt with and the real space charge distribution in dielectrics is obtained.