RESEARCH ON CHEMICAL KINETICS AND CALCULATION OF ENERGY DEPOSION IN KrF<sup>*</sup> EXCIMER SYSTEM PUMPED BY PROTON-BEAM

Wang Xiaosha; Chen Dongquan; Wang Zhengyan

Wang Xiaosha, Chen Dongquan, Wang Zhengyan. RESEARCH ON CHEMICAL KINETICS AND CALCULATION OF ENERGY DEPOSION IN KrF* EXCIMER SYSTEM PUMPED BY PROTON-BEAM[J]. Chinese Journal of Computational Physics, 1992, 9(3): 263-266.

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RESEARCH ON CHEMICAL KINETICS AND CALCULATION OF ENERGY DEPOSION IN KrF^* EXCIMER SYSTEM PUMPED BY PROTON-BEAM

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Abstract

The computational program of chemical kinetics of KrF^* excimer laser pumped by e-beam is modified. The kinetics and energy deposition for the mixture system of Ar, Kr and F₂ pumped by proton-beam is calculated. The results show that deposited energy is about 50 times as much as by e-beam-pumping for the same pressure, the same mixture of the gases and the same current density.

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RESEARCH ON CHEMICAL KINETICS AND CALCULATION OF ENERGY DEPOSION IN KrF* EXCIMER SYSTEM PUMPED BY PROTON-BEAM

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RESEARCH ON CHEMICAL KINETICS AND CALCULATION OF ENERGY DEPOSION IN KrF^* EXCIMER SYSTEM PUMPED BY PROTON-BEAM